邢唷 > 欹 '` 鳵 rt bjbj鲟鲟 攰 攰 X X X X $ p/ p/ p/ P / < 0 d 媽 l1 1 1 1 1 蔃 蔃 蔃 螊 袐 袐 袐 袐 袐 袐 $ h } 魦 Q 淏 0@ 蔃 淏 淏 魦 X X 1 1 E 鬞 鬞 鬞 淏 X X 1 1 螊 鬞 淏 螊 鬞 鬞 畠 1 `1 0炍nu曃 p/ 鬘 唫 ( 螊 [ 0 媽 畟 蘏 Y P 畠 畠 l 5 $ 蔃 0 鶣 " 鬞 A 8A d 蔃 蔃 蔃 魦 魦 朤 ^ 蔃 蔃 蔃 媽 淏 淏 淏 淏 d L$ $ L$ X X X X X X bg係5R6RzO(uSf[罷oRir▼ 歂鹼邁茤b褃b( 蟼轢) 齆 gP杔Q鳶 hg?e* Xd 亯 薔蛜(W NTbg5R係剉qQT裇皊v^蹚 Nek)R(u瀃寶▼╟簨剉颯齹'`0蜰T筫b梽vpencegw鍕oRirND M S O gsQ0購7h剉裇皊d枂N>f:ybg5R係剉O(uSf[罷N痵僗蔛菑鋘hVKN魰剉 YBg鴙扤sQ鹼KNYT鰁_N鳴>f歔gu痵僗纇Km鵞痵僗龔*巹v蛻亯'`0 sQ.曂 bg係5R6RzD M S O 痵僗纇Km A n I n v e s t i g a t i o n o f B y p r o d u c t o f C h e m i c a l s U s e d b y A r r a y P r o c e s s in FPD Plant Yang Cheng Yu Abstract A common finding in different plants and further experiment for deduction validation would be introduced. Based on all relating data, it could be deduced the byproduct might be highly related to DMSO. Such a finding not only indicates the complex relationship between chemicals used in process, environment and particulate filters but also shows the importance of periodical environment sampling and monitoring. Keywords FPD plant a r r a y p r o c e s s D M S O e n v i r o n m e n t s a m p l i n g _ bgN鹼1u NT剉u錧z侤b膥bMb g蔔錯b霳@b翂剉s^g5u茐0s^g梴:g0zf齹媁Kb:gI{艌n剉鶴皊0鍌1\錧z6Rz@bO(uSf[罷簨R錘5R係儚:N YBgY7h0 D M S O /f5R係eR粂6Rz8^(u剉 N蛓Sf[罷0僛蟸8^孴M E A Nv^O(u0D M S O ck/fb霳骮亯薔蛜剉;N覊0 (W菑籗嶯-N齎'YF柺S餝~n$N0W NTbg係剉痵僗纇Km蟸寶虘b霳 N鰁裇皊 N*NND M S O ^8^鴙螾剉Sf[ir1u嶯 N/fUS N剉bg係剉*NHh/fww峞g闟亯/f購*Nbg係袕lYEN1\螾/f N蛓臺6q剉歔媉 N7h郪dk_裇b霳剉}YGYv^蹚 NekU\ _ N*Nu痵僗Y剉瀃寶(u錘nxb霳鵞vQu剉╟KmN骮誰0 KN@b錘O魦/f6RzO(uSf[罷oRir Neg/f僛瀃(WND M S O *Y螾孨eg/f N,倓v5R係eR粂6Rz NOO(u僛郪dk╟Km:NoRir0 髞嶯僛鵞罷 g鄀qS砙 }6qb霳O(u N*N髞蔔蚇6q琡*g砆剉Hh婳ZP:NNeg剉 _:WFOb霳蚇6q軴c _>e剉藌:W_N^g^'Y剉麐賬圢轛蚑NcYe 顣槝 術剠渷5uvfSO( T F T ) bg係(W係5R6Rz虘鶴皊俌 1 剉顣槝0 購顣槝颯錘饄KN:NI T O P e e l i n g 0(W孾bI T O @暅T秗礠/fo倉Y剉FO(WI T O A n n e a l T購蛓珗饄KN:Nzzm剉臽礠1\鶴皊哊0 蜰E D X 剉1宔gw詋儚yr+RKNY擽鍕1\/f硏0'l蔛kx購 N*NCQ }0